A nuclear magnetic resonance (NMR) probe component, comprising a microfabricated planar gradient chip (1), with a substrate thickness d.sub.gc.ltoreq.3 mm, carrying three micromachined planar partial gradient coils (10a-10f) on each of its two outer surfaces (12a, 13a), wherein the partial gradient coils (10a-10f) of the gradient chip (1) form a three-dimensional gradient system, wherein the gradient chip (1) has a central guiding and positioning slot (15) between the two outer surfaces (12a, 13a). The probe component also has a sample chip (2) for carrying an NMR sample at a sample location, with a microfabricated planar RF coil (21), wherein the sample chip (2) fits exactly in the guiding and positioning slot (15) such that in a measurement position, the sample location coincides with the center of the gradient system. The NMR probe component has improved spatial resolution and allows good alignment of the RF coil and the gradient system.