A hinge type MEMS switch that is fully integratable within a semiconductor
fabrication process, such as a CMOS, is described. The MEMS switch
constructed on a substrate consists of two posts, each end thereof
terminating in a cap; a movable conductive plate having a surface
terminating in a ring in each of two opposing edges, the rings being
loosely connected to guiding posts; an upper and lower electrode pairs;
and upper and lower interconnect wiring lines connected and disconnected
by the movable conductive plate. When in the energized state, a low
voltage level is applied to the upper electrode pair, while the lower
electrode pair is grounded. The conductive plate moves up, shorting two
upper interconnect wirings lines. Conversely, the conductive plate moves
down when the voltage is applied to the lower electrode pair, while the
upper electrode pair is grounded, shorting the two lower interconnect
wiring lines and opening the upper wiring lines. The MEMS switch thus
formed generates an even force that provides the conductive plate with a
translational movement, with the displacement being guided by the two
vertical posts.