A process for the production of trialkylsilyl (fluorosulfonyl)difluoroacetate by contacting (fluorosulfonyl)difluoroacetyl fluoride with siloxane. The amount of (fluorosulfonyl)difluoroacetic acid by-product in trialkylsilyl(fluorosulfonyl)difluoroacetate is reduced by contacting said mixture with trialkylsilyl halide.