In one aspect, a VCSEL includes a base region that has a vertical growth
part laterally adjacent a first optical reflector and a lateral growth
part that includes nitride semiconductor material vertically over at
least a portion of the first optical reflector. An active region has at
least one nitride semiconductor quantum well vertically over at least a
portion of the lateral growth part of the base region and includes a
first dopant of a first electrical conductivity type. A contact region
includes a nitride semiconductor material laterally adjacent the active
region and a second dopant of a second electrical conductivity type
opposite the first electrical conductivity type. A second optical
reflector is vertically over the active region and forms with the first
optical reflector a vertical optical cavity overlapping at least a
portion of the at least one quantum well of the active region. A method
of fabricating a VCSEL also is described.