A tool head includes a holder for accommodating a tool and two actuators
each of which is connected to the holder via a web. On the one hand, the
actuators enable the holder to be deflected by a few micrometers from a
resting position and, on the other hand, enable ultrasound to be applied
to the holder. For this purpose, the actuators contain a piezoelectric
drive. Depending on the application, the tool head can be mounted on a
conventional machine tool. The tool head is suitable for many
applications, in particular for the production of micro-mechanical
structures in the surface of a workpiece.