Flame produced vapors for combustion chemical vapor deposition are redirected from the direction of the flame by differential atmospheric pressure, such as positive pressure provided by a blower or negative pressure provided by a vacuum. This allows, for example, lower surface temperatures of substrates being coated with flame-produced vapors and coating of interior surfaces.

 
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< Substrate mounted with electronic element thereon and liquid ejection head including the substrate

> Gas barrier clear film, and display substrate and display using the same

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