A method and a relative test structure for measuring the coupling
capacitance between two interconnect lines exploits the so-called
cross-talk effect and keeps an interconnect line at a constant reference
voltage. This approach addresses the problem of short-circuit currents
that affect known test structures, and allows a direct measurement of the
coupling capacitance between the two interconnect lines. Capacitance
measurements may also be used for determining points of interruption of
interconnect lines. When a line is interrupted, the measured coupling
capacitance is the capacitance of a single conducting branch. The
position of points of interruption of an interconnect line is determined
by measuring the coupling capacitance of all segments of the line with a
second conducting line.