A silicon bulk-micromachining technology is used to fabricate a GMR filter
by exploiting the structure of a suspended silicon nitride (SiNx)
membrane on the silicon substrate. A first silicon nitride (SiNx) thin
film and a second silicon nitride (SiNx) thin film are formed on opposite
sides of the silicon substrate. A first opening is defined in the first
silicon nitride (SiNx) thin film, and a grating structure is defined in
the second silicon nitride (SiNx) thin film. By etching off a portion of
the silicon substrate exposed from the first opening until a portion of
the second silicon nitride (SiNx) thin film is exposed from the first
opening, a light path space is defined.