A piston is reciprocated axially at high speed at very small amplitude by an actuator in the larger-diameter base of an acoustic resonator. According to pressure fluctuation in the acoustic resonator involved by reciprocal motion of the piston, fluid is sucked into and discharged from the acoustic resonator via a valve device at the top end of the acoustic resonator. The acoustic resonator is contained in a gas guide. Fluid from the valve device is introduced into the gas guide to cool the valve device.