An adhesive sheet for laser processing comprises an adhesive layer
laminated on the surface of a base film, wherein the base film has a
textured contact-reducing layer on the back side thereof. According to
the adhesive sheet for laser processing of the present invention, the
melting of the base film caused by the local concentration of laser beam
energy at the places irradiated with the laser beam can be effectively
prevented. Accordingly, the back side of the base film can be prevented
from locally adhering to the processing table in the dicing apparatus,
and subsequent steps, namely, drawing the base film to separate the
workpiece from the adhesive layer, and individually recovering these, can
be carried out easily and efficiently.