An object of the invention is to provide a resist composition which is
possible to form a film by using a drawing means and which functions as a
protective film used at the time of etching, adding impurities, or the
like. In addition, an object is also to provide a manufacturing step of a
semiconductor device in which a substance with high safety and that is
easily treated can be used as a peeling solution, and which pays
attention to an environment. A resist composition of the invention
contains water-soluble homopolymer, water, or a solvent that has
compatibility with water and can dissolve the water-soluble homopolymer.
In addition, a method for manufacturing the semiconductor device of the
invention has a step of removing the protective film formed by
discharging the resist composition of the invention by using a drawing
means with water after using it.