An optical element comprising at least a plurality of pixels formed on a
substrate and partition walls arranged respectively between adjacent
pixels is manufactured by a method comprising steps of forming partition
walls of a resin composition on a substrate, performing a dry etching
process by irradiating the substrate carrying the partition walls formed
thereon with plasma in an atmosphere containing gas selected from oxygen,
argon and helium, performing a plasma treatment process by irradiating
the substrate subjected to the dry etching process with plasma in an
atmosphere containing at least fluorine atoms, and forming pixels by
applying ink to the areas surrounded partition walls by means of an
ink-jet system.