An InGaN active layer is formed on a sapphire substrate. A p-side
electrode is formed on the InGaN active layer to supply an electric
current to this InGaN active layer. The p-side electrode includes {circle
around (1)} an Ni layer for forming an ohmic contact with a p-GaN layer,
{circle around (2)} an Mo layer having a barrier function of preventing
diffusion of impurities, {circle around (3)} an Al layer as a
high-reflection electrode, {circle around (4)} a Ti layer having a
barrier function, and {circle around (5)} an Au layer for improving the
contact with a submount on a lead frame. The p-side electrode having this
five-layered structure realizes an ohmic contact and high reflectance at
the same time.