A MEMS system including a fixed electrode and a suspended moveable
electrode that is controllable over a wide range of motion. In
traditional systems where an fixed electrode is positioned under the
moveable electrode, the range of motion is limited because the support
structure supporting the moveable electrode becomes unstable when the
moveable electrode moves too close to the fixed electrode. By
repositioning the fixed electrode from being directly underneath the
moving electrode, a much wider range of controllable motion is
achievable. Wide ranges of controllable motion are particularly important
in optical switching applications.