A trench isolation type semiconductor device in which a recess is
prevented from being formed in a field region and a method of fabricating
the same are provided. The trench isolation type semiconductor device
includes a semiconductor substrate defined by an active region and a
field region, a trench formed in the field region, an oxide layer
conformally formed along the inside of the trench, a liner layer
conformally formed along the oxide layer, a field insulating layer formed
inside the trench including the oxide layer and the liner layer, and a
field protection layer formed on the field insulating layer so that a
step difference does not occur on the semiconductor substrate.