Lithographic projection assembly, including at least one load lock for
transferring objects, in particular substrates, between a first
environment and a second environment, the second environment preferably
having a lower pressure than the first environment; an object handler
including a handler chamber in which the second environment prevails; and
a lithographic projection apparatus including a projection chamber. The
handler chamber and projection chamber can communicate for transferring
the objects. The load lock includes a load lock chamber; evacuation
device for evacuating the load lock chamber; and door device for closing
the load lock chamber during evacuation and for opening the load lock
chamber to enter an object in or remove an object from the load lock
chamber. The load lock chamber may be provided with at least two mutually
distinct object support positions.