The present invention is an iterative method or procedure involving a
series of optical proximity correction (OPC) process steps for refining
an integrated circuit design layout on a wafer during a photolithographic
process. The iterative method may be applied as a system and computer
program to perform classifying and grouping edge fragments according to
directional orientations, selecting an edge fragment or a combination of
non-opposing edge fragments, calculating an edge placement error of the
selected edge fragment and proximally shifting the edge fragment until a
quality limitation is met.