A method of fabricating a nanotube structure which includes providing a
substrate, providing a mask region positioned on the substrate,
patterning and etching through the mask region to form at least one
trench, depositing a conductive material layer within the at least one
trench, depositing a solvent based nanoparticle catalyst onto the
conductive material layer within the at least one trench, removing the
mask region and subsequent layers grown thereon using a lift-off process,
and forming at least one nanotube electrically connected to the
conductive material layer using chemical vapor deposition with a methane
precursor.