A temperature control assembly for use in etching processes includes a
housing, a cooling conduit, fasteners, and a mounting block. The
fasteners couple to the housing and operate to associate the cooling
conduit, which is formed from a non-corrosive metallic material, with the
housing. The mounting block is coupled to the cooling conduit. Also, a
method for retrofitting an existing temperature control assembly includes
removing an original cooling mechanism, selecting a retrofit cooling
conduit formed from a non-corrosive metallic material, coupling fasteners
to a housing of the temperature control assembly to associate the
retrofit cooling conduit with the housing, and coupling a retrofit
mounting block to the retrofit cooling conduit.