An acoustic pressure type sensor fabricated on a supporting substrate is
disclosed. The acoustic sensor is fabricated by depositing and etching a
number of thin films on the supporting substrate and by machining the
supporting substrate. The resulting structure contains a pressure
sensitive, electrically conductive diaphragm positioned at a distance
from an electrically conductive fixed electrode. In operation, the
diaphragm deflects in response to an acoustic pressure and the
corresponding change of electrical capacitance between the diaphragm and
the fixed electrode is detected using an electrical circuit. Two or more
such acoustic sensors are combined on the same supporting substrate with
an interaural flexible mechanical connection, to form a directional
sensor with a small surface area.