The orientation of the surface of an object to be examined is changed by
adjusting the distance thereof to an optical measuring system in a
plane-parallel manner in relation to a focusing plane of the optical
measuring system, enabling high speeds of examination to be obtained
during examination of the extended surfaces of the object. A
distance-measurement system which is mounted in an auxiliary manner with
regard to the measuring head enables fluctuations in the topography
inside the surface of the object to be compensated in such a way that a
currently received point or area can be optically sharpened.