Methods, systems, and media to define a portion of a circuit pattern with
a source of real-time configurable imaging are disclosed. Embodiments
include hardware and/or software for directing a beam through a mask onto
a wafer surface to outline a circuit pattern having an undefined area,
directing a second beam to the semiconductor wafer surface to define a
circuit structure in the undefined area to complete the circuit pattern
on the semiconductor wafer surface, and directing the second beam onto a
source of real-time configurable imaging. Embodiments may also include a
mask to include an undefined area incorporated into the circuit pattern
to leave a critical structure of the circuit pattern undefined. Several
embodiments include a photolithography system including an exposure tool,
a mask, a source of real-time configurable imaging, and addressing
circuitry.