An apparatus (3) for removing developing solution from a substrate (30)
includes a working table (36) for placing the substrate, a supporting
frame (33) positioned on the working table, a gas dispensing nozzle (31)
mounted on the supporting frame, and a water dispensing nozzle (32)
mounted on the supporting frame. The apparatus can remove the residual
developing solution from the substrate and needs not to lift the
substrate. The substrate is safely processed and the working time is
improved.