In an environmental scanning electron microscope in which differential
pumping for maintaining the pressure ratio between an electron optical
system and a specimen chamber at a predetermined value is effected and a
probe electric current is conditioned to meet a predetermined or more
value so as to permit observation of uncooked food and moist specimens in
low vacuum, there are provided three stages of objective apertures used
as apertures for an objective lens for an electron beam in the electron
optical system and used also as orifices for differential pumping for
maintaining the pressure ratio between the electron optical system and
the specimen chamber at a predetermined value. Then, a deflection fulcrum
of the electron beam in the electron optical system is set at a mid stage
of the three-stage objective aperture.