A system and method for inputting motion measurement data into a
computationally based device are provided. In a first version three-axis
accelerometer determines components of an inertial force vector with
respect to an orthogonal coordinate system. The accelerometer includes a
sensor die made of a semiconductor substrate having a frame element, a
proof mass element, and an elastic element mechanically coupling the
frame and the proof mass. The accelerometer also has three or more
stress-sensitive IC components integrated into the elastic element
adjacent to the frame element for electrical connectivity without metal
conductor traversal of the elastic element.