Light-receiving devices are two-dimensionally arranged on a substrate,
bonding pads electrically connected to the light-receiving devices in the
respective rows or columns via signal lines are arranged on the outer
periphery of the substrate, and a protective passivation film is disposed
on the light-receiving devices and signal lines, thereby forming a
light-receiving device array. On the light-receiving surface of the
light-receiving device array, a scintillator made of columnar crystals of
CsI is deposited. On the other hand, a resin frame formed like an
elongated frame is disposed inside the bonding pads. Inside this frame, a
protective film in which an inorganic film is held between organic films
made of Parylene is laminated. The outer periphery of the protective film
is in close contact with the resin frame with the aid of the coating
resin.