A varifocal optical system includes a substantially circular membrane
deposited on a substrate, and a ring-shaped PZT thin film deposited on
the outer portion of the circular membrane. The membrane may be a
MEMS-micromachined membrane, made of thermal oxide, polysilicon,
Z.sub.rO.sub.2 and S.sub.iO.sub.2. The membrane is initially in a buckled
state, and may function as a mirror or a lens. Application of an electric
voltage between an inner and outer electrode on the piezoelectric thin
film induces a lateral strain on the PZT thin film, thereby altering the
curvature of the membrane, and thus its focal length. Focal length tuning
speeds as high as 1 MHz have been demonstrated. Tuning ranges of several
hundred microns have been attained. The varifocal optical system can be
used in many applications that require rapid focal length tuning, such as
optical switching, scanning confocal microscopy, and vibration
compensation in optical storage disks.