A method of forming a protective barrier in an organic light emitting
device is disclosed, wherein the organic light emitting device is formed
on a substrate and includes a plurality of layers of materials, the
plurality of layers of materials including an organic light emitting
layer. The method includes forming an inorganic layer and a
semi-crystalline parylene-based polymer layer over an underlying layer,
wherein the semi-crystalline parylene-based polymer layer is formed via
transport polymerization of a reactive intermediate species. Organic
light emitting devices having barriers are also disclosed.