The present invention relates to a composite material and the method of
making same, which comprises a CVD diamond coating applied to a composite
substrate of ceramic material and an unreacted carbide-forming material
of various configurations and for a variety of applications. One example
of the composite material is a composite of SiC and free silicon metal
known as Reaction-Bonded Silicon Carbide. Several examples of
applications of the invention include: 1) heads or disks for conditioning
polishing pads, including pads used in Chemical-Mechanical-Planarization,
2) cutting and dressing tool inserts and tips, 3) heat spreaders for
electronic devices, and 4) wear components including mechanical seals and
pump seals.