An apparatus for providing two-phase heat transfer for semiconductor
devices includes a vapor chamber configured to carry a cooling liquid,
the vapor chamber having base section, and a plurality of
three-dimensional (3D) shaped members. The plurality of 3D-shaped members
have interior and exterior sidewalls, the 3D-shaped members being
connected to the base section so that vapor carrying latent heat can
reach the respective interior sidewalls and get transferred to the
respective exterior sidewalls configured to be in contact with an
external coolant. The vapor chamber is configured to be in contact with a
semiconductor device in order to remove heat therefrom.