The present invention relates to a process for the purification of silicone containing compounds via supercritical fluid extraction. Specifically, the present invention relates to a process comprising the steps of contacting at least one silicone containing compound with a supercritical fluid having a density of between about 0.2 and about 0.8 g/ml, decreasing said density so that two phases are formed a first phase comprising said at least one silicone containing compound and a second phase comprising at least one impurity and separating said second phase from said first phase.