In a pattern definition device for use in a particle-beam exposure
apparatus a plurality of blanking openings (910) are arranged within a
pattern definition field (bf) composed of a plurality of staggered lines
(bl) of blanking openings, each provided with a deflection means
controllable by a blanking signal (911); for the lines of blanking
openings, according to a partition of the blanking openings of a line
into several groups (g4,g5,g6), the deflection means of the blanking
openings of each group are fed a common group blanking signal (911), and
the group blanking signal of each group of a line is fed to the blanking
means and connected to the respective blanking openings independently of
the group blanking signals of the other groups of the same line.