A system and method for performing optical inspection are provided. At least one "invariant feature" of an object design is determined, and such invariant feature is used in inspecting objects having the corresponding design. An "invariant feature" is a feature that is invariant certain transformations occurring in a captured image of an object under inspection, such as brightness, color, and/or other transformations in the captured image. Accordingly, an inspection template may comprise information corresponding to at least one pre-selected invariant feature of an object's design. In certain embodiments, the template is a shape description of a feature that provides an intrinsic invariance to a specified set of basic transformations. Accordingly, the amount of pixel values stored in a template may be minimized, which minimizes the number of pixel comparisons made between a captured image of the object under inspection and the inspection template during the inspection analysis.

 
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