3C--SiC nanowhisker and a method of synthesizing 3C--SiC nanowhisker
wherein its diameter and length can be controlled. The method is safe and
low cost, and the whisker can emit visible light of various wavelengths.
3C--SiC nanowhisker is formed by depositing thin film (2) made of a metal
element on Si substrate (1), placing this Si substrate (1) into a plasma
CVD apparatus, and holding it for predetermined time at predetermined
substrate temperature in the plasma consisting of hydrogen and
hydrocarbon. Si of Si substrate (1) and C in plasma dissolve at
supersaturation into metal liquid particle (3), 3C--SiC nanowhisker (4)
grows on the metal liquid particles (3), whisker surface is terminated
with H so as to maintain the diameter constant, and the metal liquid
particles (3) at whisker root take in Si from Si substrate (1) and
penetrate into Si substrate (1).