An exposure apparatus includes a plurality of projection optical systems,
each of which has optical elements arranged in an optical path between a
first surface and a second surface and forms a radiation pattern from the
first surface onto an exposure field on the second surface via the
optical elements. The apparatus also includes a movable portion disposed
in the side of the second surface with respect to the plurality of
projection optical systems, which holds an object to be moved relative to
the exposure field in a first direction during a scanning exposure of the
object with the radiation patterns. Each of the plurality of projection
optical systems is telecentric on the side of the second surface, and the
exposure fields are arranged at different positions in a second direction
crossing the first direction.