A cooling apparatus and a direct cooling impingement module are provided,
along with a method of fabrication thereof. The cooling apparatus and
direct impingement cooling module include a manifold structure and a jet
orifice plate for injecting coolant onto a surface to be cooled. The jet
orifice plate, which includes a plurality of jet orifices for directing
coolant at the surface to be cooled, is a unitary plate configured with a
plurality of jet orifice structures. Each jet orifice structure projects
from a lower surface of the jet orifice plate towards the surface to be
cooled, and includes a respective jet orifice. The jet orifice structures
are spaced to define coolant effluent removal regions therebetween which
facilitate removal of coolant effluent from over a center region of the
electronic component being cooled to a peripheral region thereof, thereby
reducing pressure drop across the jet orifice plate.