A photovoltaic device comprising a photovoltaic cell is provided. The
photovoltaic cell includes an emitter layer comprising a crystalline
semiconductor material and a lightly doped crystalline substrate disposed
adjacent the emitter layer. The lightly doped crystalline substrate and
the emitter layer are oppositely doped. Further, the photovoltaic device
includes a back surface passivated structure coupled to the photovoltaic
cell. The structure includes a highly doped back surface field layer
disposed adjacent the lightly doped crystalline substrate. The highly
doped back surface field layer includes an amorphous or a
microcrystalline semiconductor material, wherein the highly doped back
surface field layer and the lightly doped crystalline substrate are
similarly doped, and wherein a doping level of the highly doped back
surface field layer is higher than a doping level of the lightly doped
crystalline substrate. Additionally, the structure may also include an
intrinsic back surface passivated layer disposed adjacent the lightly
doped crystalline substrate, where the intrinsic back surface passivated
layer includes an amorphous or a microcrystalline semiconductor material.