In a method for preparing a sample for electron microscopic examinations,
in particular with a transmission electron microscope (TEM), a) a
substrate containing the sample to be prepared on a sample locus is
provided in a vacuum chamber, b) a protective layer is applied onto a
surface of the sample locus, c) the sample located under the protective
layer is separated from the substrate by an ion beam, the protective
layer acting as a mask, and d) in the vacuum chamber, the separated
sample is removed from the substrate.