The present invention relates to a method for fabricating a metal
interconnection line with use of a barrier metal layer formed in a low
temperature. The method includes the steps of: forming an inter-layer
insulation layer on a substrate; etching predetermined regions of the
inter-layer insulation layer to form a plurality of contact openings;
forming an ohmic metal layer on the contact openings and the etched
inter-layer insulation layer; forming a seed layer on the ohmic metal
layer; forming a metal layer on the seed layer and nitriding the metal
layer in a repeated number of times to form a barrier metal layer; and
forming a metal interconnection line on the barrier metal layer by
burying the contact openings.