The above and other needs are met by an inspection system having a sensor
array that is connected to a high speed network connection, and is
adapted to provide image data in regard to images of a substrate. A
process node is also connected to the high speed network connection, and
is adapted to received the image data over the high speed network
connection and to analyze the image data to detect anomalies in the
images. In this manner, commercially available hardware can be used to
construct the inspection system, which thus overcomes many of the
problems with expensive, unreliable, and inflexible prior art inspection
systems.