A method for growing a silicon single crystal ingot by a Czochralski
method, which is capable of providing silicon wafers having very uniform
in-plane quality and which results in improvement of semiconductor device
yield. A method is provided for producing a silicon single crystal ingot
by a Czochralski method, wherein when convection of a silicon melt is
divided into a core cell and an outer cell, the silicon single crystal
ingot is grown under the condition that the maximal horizontal direction
width of the core cell is 30 to 60% of a surface radius of the silicon
melt. In one embodiment the silicon single crystal ingot is grown under
the condition that the maximal vertical direction depth of the core cell
is equal to or more than 50% of the maximal depth of the silicon melt.