In order to provide a photothyristor having high breakdown voltage and
less-varying light sensitivity by improving the sensitivity and the
breakdown voltage of the device while maintaining the device small, the
device includes a silicon substrate, a transistor portion including an
anode region, a gate region and a cathode region and placed on a first
main surface of the silicon substrate, a light-receiving portion for
receiving light from the outside, and an electrode for establishing an
ohmic contact between the anode region and the cathode region. The light
receiving portion includes an oxygen-doped polysilicon film overlaid on
the silicon substrate through a transparent insulating film and is
disposed to surround the transistor portion. The electrode is placed
above the transistor portion and has a double-structure consisting of a
center portion and an outer portion surrounding the center portion, and
the center portion and the outer portion are electrically connected.