An optical microbench configured to facilitate wafer-level testing of
opto-electronic devices is provided. The optical microbench includes an
optoelectronic device mounted to a wafer in which the optical microbench
is provided. The optical microbench also includes a beam deflector
provided in the wafer and disposed along the optical path of the
optoelectronic device. The beam deflector is configured to deflect a
portion of the optical path to lie along a direction oriented out of the
plane of the wafer. The optical microbench further includes an optical
feed-through disposed along the optical path between the optoelectronic
device and the beam deflector. The optical feed-through is configured to
conduct an optical signal between the beam deflector and the
optoelectronic device. A method for testing optoelectronic devices at the
wafer level is also provided.