An optically coupled resonant pressure sensor includes a deformable
diaphragm and an optically coupled resonator fixedly attached to the
deformable diaphragm. The resonator includes a resonator body and a
laterally offset photodiode adjacent to the resonator body. The resonator
is driven by an electric field generated between the laterally offset
photodiode and the resonator body when an incident light strikes the
photodiode. Pressure applied to one side of the deformable diaphragm
causes a shift in a resonant frequency of the resonator. Also disclosed
are a method and system for determining pressure.