A magnetron sputtering target assembly, comprises a target adapted to
comprise of at least one material to be sputtered, the target including a
pair of oppositely facing surfaces; and a magnet assembly comprising a
plurality of Halbach magnet arrays adjacent one of the surfaces for
providing magnetic field lines which emerge from and re-enter the other
of the surfaces to form an arched, closed-loop magnetic field path over
the other surface. The enhanced magnetic flux intensity provided by the
Halbach magnet assemblies, relative to conventional magnetron magnet
assemblies, facilitates sputtering of thick targets comprised of magnetic
materials in the manufacture of recording media, as well as low pressure
sputtering of high quality carbon-containing protective overcoat
materials for such media.