Copper plating baths containing a leveling agent that is a reaction
product of a compound including a heteroatom chosen from nitrogen, sulfur
and a mixture of nitrogen and sulfur, with a polyepoxide compound
containing an ether linkage that deposit copper on the surface of an
electronic device and in apertures on such substrate are provided. Such
plating baths deposit a copper layer on the substrate surface that is
substantially planar across a range of electrolyte concentrations.
Methods of depositing copper layers using such copper plating baths are
also disclosed.