A monomer suitable for use in forming low dielectric constant films in
semiconductor devices comprising i) two dienophile groups (A-functional
groups) attached to a single aromatic ring and ii) a second ring
structure comprising two conjugated carbon-to-carbon double bonds and a
leaving group L (B-functional group), characterized in that said single
aromatic ring is directly covalently attached to one of the double bonded
carbons of the B functional group or to a fused aromatic ring containing
two such double bonded carbons of the B-functional group, and one
A-functional group of one monomer is capable of reaction under
cycloaddition reaction conditions with the B-functional group of a second
monomer to thereby form a polymer.