An improved interconnection system and method is described, such as for
connectors, socket assemblies and/or probe card systems. An exemplary
system comprises a probe card interface assembly (PCIA) for establishing
electrical connections to a semiconductor wafer mounted in a prober. The
PCIA comprises a motherboard parallel to the semiconductor wafer having
an upper surface and an opposing lower planar mounting surface, a
reference plane defined by a least three points located between the lower
surface of the motherboard and the wafer, at least one component located
below the motherboard mounting surface, and a mechanism for adjusting the
planarity of the reference plane with respect to the wafer. A probe chip
having a plurality of spring probes extending there from is mountable and
demountable from the PCIA, without the need for further planarity
adjustment. The interconnection structures and methods preferably provide
improved fabrication cycles.