It is provided an optical waveguide device in which the radius of curvature of a curved part of an optical waveguide can be lowered and the radiation loss of light in the curved part can be reduced. An optical waveguide device 2 has a ferroelectric optical waveguide substrate and an optical waveguide 5 formed in or on the substrate and modulating electrodes 4A, 4B and 4C. The thickness of the optical waveguide substrate is 30 .mu.m or smaller at least in a region where the optical waveguide is formed. The optical waveguide has curved part having a radius of curvature of 30 mm or smaller.