A thin film solid oxide fuel cell (TFSOFC) having a porous metallic anode
and a porous cathode is provided. The fuel cell is formed by using a
continuous metal foil as a substrate to epitaxially deposit a thin film
electrolyte on one surface of the foil. The metal foil may then be made
porous by photolithographically patterning and etching the other surface
of the foil to form holes extending through the foil to the
electrolyte/foil interface. The cathode is then formed on the electrolyte
by depositing a second thin film using known film deposition techniques.
Further processing may be used to increase the porosity of the
electrodes. The metal foil may be treated before film deposition to have
an atomically ordered surface, which makes possible an atomically ordered
thin film electrolyte.